JPSA Offers Select Optics for UV Laser Systems
January 12, 2007
Manchester, New Hampshire, USA – JP Sercel Associates (JPSA Laser) announces the availability of a wide variety of custom and select optics for deep-UV excimer and UV-DPSS lasers and beam delivery systems. JPSA Select Optical Products are made from premium UV-grade fused silica, calcium fluoride and magnesium fluoride materials. All optics are 100% inspected in JPSA’s optical testing lab.
JPSA manufactures its own brand of multi element imaging lenses; this in-house comprehensive optics design capability gives JPSA the ability to use many stock lenses or to design new lenses for specific applications, including drilling and micromachining micron-scale features. JPSA engineers have developed F2 laser, optics, calorimetry, and beam delivery technology, allowing JPSA to offer comprehensive testing of VUV optics and materials processing services at 157nm.
JPSA works with a select group of optics fabricators and coating houses to create optics with much tighter tolerances and longer lifetimes than those available from the catalog houses. JPSA operates a high-volume UV laser job shop; consequently, JPSA doesn’t merely supply optics, but uses the same optics in its own demanding production environment.
DUV Select Optics products available from JPSA include (but are not limited to) the following:
- High resolution telecentric lenses:
- 4X demag, 3.5mm FOV, 1 µm resolution
- 5X demag, 20mm FOV, 5 µm resolution
- 10X demag, 2.5mm FOV, 2 µm resolution
- Spherical and cylindrical singlet lenses with surface figures of 1/10 wave, 10-5 scratch dig
- Plano convex and plano concave optics available in a variety of focal lengths
- Energy monitor beam splitters
- VUV/UV grade Magnesium Fluoride resonator optics:
- Front windows and rear mirrors
- Acid resistant coatings
- Exacting wedge specifications and tolerances for superior beam quality
- Turning mirrors with "superpolished" surfaces and high damage, high power, long life coatings
- Telescopes, beam expanders, and condensers
- Beam shapers to match the laser beam to a mask with >95% beam utilization
- Beam splitters; partial reflectors and geometric dividers
- Dielectric laser masks for use with excimer, CO2, and YAG
- Variable beam attenuators
- Multi-layer dielectric high reflection and anti-reflection coatings
for 308nm, 248nm, 193nm, and 157nm wavelengths at any angle of incidence
JPSA products and services include UV excimer and DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information about JPSA Select Optics, visit www.jpsalaser.com; for pricing, and availability, contact the company at 220 Hackett Hill Rd., Manchester NH 03102 USA, Tel. 603.518.3200, fax 603.518.3200. E-mail: info@jpsalaser.com.
