JPSA Introduces High-Precision Z-theta Motorized Rotary Stage
December 2, 2006
Manchester, New Hampshire, USA - A new integrated Z-theta motorized stage from J. P. Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning. Its non-contact operation – as opposed to typical worm and wheel rotary designs — reduces maintenance requirements, is less susceptible to wear, and is not affected by torque variations because there’s no gear interface. The new Z-theta stage provides 360 degrees of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.
Advantages of the new rotary stage include continuous or limited travel, excellent accuracy and repeatability, a cog-free motor for smooth motion; zero gear backlash; low wobble and bearing run-out; and no accuracy changes over time due to gear wear.
The stage is ideal for laser micromachining applications and wafer processing, among others. Resolution (microns/arc seconds) is 0.25µm in the Z axis, and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z axis, and ±1 arc second for Theta.
JPSA products and services include UV excimer, DPSS and ultra-fast laser micromachining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 220 Hackett Hill Road, Manchester, NH 03102 USA, Tel. 603.518.3200, fax 603.518.3298.
