JPSA UV Laser Applications — Glass and Hard Materials
The following are examples of glass and hard materials processing at the JPSA applications laboratory.
Small holes in sapphire
Square blind holes, approximately 4µm wide, in glass
Square blind holes in glass, 2µm wide, showing tops and bottoms of holes
Zero taper hole through 1mm silicon nitride substrate
Blind via parallel processing in silicon nitride
Fused silica micromachined with 157nm excimer
