
Applications
Lasers for Silicon Photovoltaics
A great engineering effort is underway to produce the next generation of Photovoltaics. The goal being to lower the cost per kWh of electricity generated by solar cells to reach a cost parity with conventional fossil fuels. In order to achieve this objective, researchers are investigating new cell manufacturing techniques to both boost efficiency and lower manufacturing costs. Laser systems and novel optical configurations play a vital role in this endeavor.
For Crystalline Silicon (c-Si), there are a number of applications where lasers improve the process quality while also improving throughput. In single-crystal silicon, the ordered nature of the atoms permits efficient electron travel through the material. Pure silicon alone does not generate a sufficient electron flow. Adding impurities into the silicon results in greatly enhance electron mobility. Typically, the silicon is doped with Phosphorous which has an extra electron in its outer valence and is called n-type. To create p-type silicon, a doping process is used to introduce Boron into the silicon. Boron lacks an electron in its outer shell which results in a 'hole'. The P-N junction created allows the silicon to act as a semiconductor with typical efficiencies of 15-18%.
Using lasers with a pulse duration below 30ns minimizes thermal affectation as compared to other long-pulse or continuous wave industrial lasers. Ultraviolet (UV) radiation typically leads to increased absorption in the material as compared to longer wavelengths, which permits higher-resolution processing. The choice of laser and wavelength is application dependant and related to the light absorption behavior of the material and to the geometry required.
Wafer cutting
In many cases, the standard wafer size of a nominal 156mm square is not ideal in for instance, concentrator applications. The wafer is downsized and sectioned to fill the area of the concentrator optics field of view. JPSA has cut Sunpower, Evergreen Solar and Suniva wafers for our customers.
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By optimizing the laser wavelength, power and laser beam delivery system, extremely narrow cut widths with high throughput are produced by the SuperScribe™. Typical performance is 7 micron wide cut, 150 microns deep at 150mm/sec with no microcracks. By using high performance motion stages, accuracies of +/-3 microns for the cuts are achieved. Additionally, laser dicing is a non-contact method and may be used to cut through the metal traces.
Laser Edge Isolation
To prevent recombination or current flow towards the edge of the silicon wafer, a trench is created for electrical isolation. Here, a single pass around the perifery of the focussed laser beam creates a groove with high efficiency. Typical dimensions for laser edge isolation are 30-50µm wide and 5-10µm deep.
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To minimize losses from shading of the silicon by the front metal traces, techiques such as Metal Wrap Through (MWT) or Emitter Wrap Through (EWT) are employed. For MWT, the Emitter busbar is relocated to the rear of cell with the contact fingers remain on top surface. Laser-drilled vias connect the two. For EWT, all electrical contacts are relocated on rear of cell and requires 10,000 or more laser drilled through holes.
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JPSA is involved in a number of production and research applications for advanced laser techniques in c-silicon:
- Silicon wafer cutting and downsizing
- Laser Edge Isolation
- Via drilling for Metal Wrap Through (MWT)
- Via drilling for Emitter Wrap Through (EWT)
- Emitter Contact Formation: Laser Grooving
- Laser marking
- Laser fired contacts
- Laser annealing and doping
- Laser surface texturing
Laser Micromachining
JPSA Laser provides excimer, Diode Pumped Solid State (DPSS), and Ultrafast laser micromachining solutions for:
- Thin Film PV Patterning
- Laser Scribing
- LED Lift-Off (LLO)
- Advanced Laser Lift-Off
- Metal Dicing
- Laser Dicing
- Via Drilling
- Silicon Edge Isolation
- Ink-Jet Nozzles
- Microfluidic Devices
- Micro Vias
- Annealing and Doping
- Parylene Ablation
- 3D Micro Features
- Concentrator Photovoltaics


