JPSA IX-1200 UV Excimer Laser Micromachining System
The IX-1200 is a high-accuracy, ultra-stable, UV excimer laser workstation. The IX-1200 has a sturdy frame constructed of heavy wall, welded steel. The integrated laser is mounted on a triple vibration isolated frame. The laser can be easily removed from the system for laser service. The part handling system and laser beam delivery optics are mounted to a granite support structure that is also triple vibration isolated.
High resolution, modular VUV beam delivery components such as precise, multi-element lenses, beam homogenizers, special high-power UV fused silica masks and computer-controlled variable attenuators are included. Beam delivery optic mounts are precision, kinematic components designed by JPSA.
The IX-1200 is available with up to 12 axes of motion control for part handling and automated beam delivery.
A wide range of options provides the most advanced, high-accuracy processing capabilities available today in any UV laser micromachining system.
The IX-1200 includes the Microtech™ camera system, which includes on-target process viewing and high-resolution part alignment cameras. The part alignment camera has an on-screen magnification of up to 2,000X. Using the part alignment camera, you can align laser generated features within 1 micron.
The user-friendly Windows based control software controls stages motions, laser firing, digital I/O and machine vision. The project management feature allows you to rapidly change over from one production setup to another.
The IX-1200 is a Class I system. The process enclosure is fully interlocked. JPSA's exclusive computer operated soft-lift door provides operator access for convenient part exchange.
Robust, yet compact, the IX-1200 workstation is ideally suited for R&D and high volume production for applications such as via drilling. The system is supported by a full one-year warranty and experienced service teams are ready to assist our customers worldwide.
For more information, contact JPSA.
