While excimer lasers are available in a variety of packages, all commercial excimer lasers employ the modules shown here.
Laser light is generated in the laser cabinet. The electrical energy required by the laser to form laser pulses is generated by the high voltage supply. A gas supply and a vacuum pump are required to fill the laser with the appropriate laser gas mixture. The control computer is usually linked to the laser cabinet and high-voltage supply by a fiber optic network. The computer provides laser function user control.
Typical excimer laser configuration