UV Excimer Laser Advantages

Excimer lasers bring the following advantages to micromachining applications:

Unique properties of excimer laser radiation

• Short wavelength: 193nm to 351nm.
• High optical resolution: less than 1m.
• Shallow absorption depth:0.1 to 0.5µm.
• Small interaction volume.
• Energy highly absorbed by materials.
• Large area multi-mode beam.
• Uniform power density over relatively large area.
• High peak power: approximately 107 watts.
• Sufficient power to ablate materials at low beam demagnifications.

Resulting benefits in materials processing

• High peak power and small interaction volume results in high-energy material ablation with little heat transfer to surrounding material.
• Shallow absorption depth allows tight control of feature depth by controlling number of pulses to which the material is exposed.
• Short optical wavelength provides high resolution generation (approximately 1µm features in process materials).
• Large beam size and high peak power allow simultaneous large area exposure.

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