UV Excimer Laser Disadvantages

Like other technologies, excimer lasers are not without their disadvantages:

Discharge circuit

• High performance discharge circuit is required to generate laser light.
• High speed switches and pulse compression electronics are required.
• High performance electronics require frequent maintenance.

Toxic laser gas

• Laser gas mixture is toxic and corrosive.
• Reactivity of lasant mixtures result in impurities formation during laser operation.
• The laser must be refilled with fresh gas regularly.
• Sophisticated gas processing equipment is required to extend gas fill lifetimes.
• A computer control system is required to maintain stable laser light output.
• Changes in gas chemistry affect beam shape and quality.
• The toxic nature of halogen gas constituent requires using sophisticated gas handling and safety equipment.
• The internal laser head mechanics must be designed to function in the corrosive environment of laser gas.
• The laser vessel corrosive environment reduces reliability and life on internal components.

Managing high-power UV

• High power ultraviolet beams are difficult to handle optically.
• Advanced optical materials are required to efficiently transmit the beam.
• Optic transmissivity degrades over long-term exposure to high-power UV beams.
• Optical surfaces and coatings are damaged quickly by laser light if not kept clean.

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