Beam Profile Viewing

The are two types of useful UV beam profile viewing:

Raw beam directly from the laser

• Provides important information on the status of the laser.
• Provides information useful for aligning resonator cavity after optics replacement.

Through the mask

• Energy distribution on-target is known by viewing beam at the mask.
• Provides important process control information.
• Provides verification of proper alignment between laser beam and mask.

Care must be taken when using beam-shaping optics so that the beam splitter or detector damage threshold is not exceeded.

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