Microscope imaging systems have short focal lengths, high optical magnification and low spherical distortion. Microscope imaging systems use achromatic lenses to simultaneous image UV and visible light, allowing on-target viewing during processing.
The exact imaging system specifications depend on the objective used.
|
Objective Type |
|
|---|---|---|
Multi-element Refractive |
Schwarzschild Reflective |
|
Resolution |
0.25µm to 0.5µm |
0.5µm to 1.0µm |
Field size |
Up to 150µm |
Up to 300µm |
Complexity |
High |
Low |
Coast |
High |
Moderate |
Losses |
High |
Low |
Notes |
Elements are AR coated to reduce losses |
Prism illuminator required to miss central obscuration |