Microtech™ Modular Tabletop Beam Delivery System
JPSA’s modular tabletop Microtech™ Beam Delivery (MBD) System is a low cost, yet full featured, compact UV laser beam delivery and microscope camera system designed for materials processing research. The MBD is a flexible, easy-to-install and use beam delivery platform designed to mount on a standard optical breadboard.
Applications include:
- Lithography
- Selective material removal
- 3-D micromachining
- High-precision drilling, cutting, marking and surface scanning
The MBD offers the precision and high performance of larger, more complex and costly systems. Its unique design and robust features allow you to achieve professional, repeatable, high precision results quickly and easily. It’s ready to "plug and play" right out of the box.
The MBD's input beam height matches most commercial excimer lasers and is easily adjusted. On-target vision capability expedites focusing and provides a high quality visual image, zoomable for micro and macro viewing. Variable laser image magnification can be fine-tuned for exact mask overlay. Variable laser fluence fine adjustment provides the finesse required for difficult and high-precision tasks.
The base system includes:
- An on-target camera (28X-180X)
- A variable attenuator
- Variable magnification
- A Z-axis crossed roller stage with course and fine focusing adjustment
- A mask set
- A field lens and high performance doublet objective for better than 5µm on-axis spots
The base system can adapt to up to three different lasers with a simple optics change routine.
Optional components include:
- Motion control
- Air bearing stages
- Additional motion stages
- Specially coated optics
- Additional beam delivery components
For more information, contact JPSA.
