JPSA Beam Delivery Systems and Components

JPSA offers a variety of beam delivery options, configurable to your particular application.

Beam Delivery Systems

JPSA offers two beam delivery systems: the Microtech™ Modular tabletop system and the standard VUV BDS.

Microtech™ Modular Tabletop Beam Delivery System

A low cost, but full featured compact, modular tabletop beam delivery system and microscope camera designed for materials processing research. For more information on the modular tabletop beam delivery system, see the MBD page.

VUV Beam Delivery System

Designed for quick and easy reconfiguration, the VUV BDS is particularly well suited for those operating in the demanding short wavelength (157 to 193nm) VUV (vacuum ultra violet) wavelength range.

This inert gas-purged system offers greater flexibility and cost savings over sealed vacuum systems, making it cost-practical for commercial and research users, especially those with a high product mix or medium volume production runs.

The JPSA VUV BDS is designed so that certain modules have ports for the introduction of slightly pressurized high purity, inert gases that purge the system. Controlled leakage at specific points (like the connection of a movable part, such as an actuator to the outside) allows slight egress of gas to the outside at any point where contaminants (ambient air) might otherwise enter the system.

For more information on the VUV BDS, contact JPSA.

BDS Components

Individual beam delivery system components include VUV adapters, beam dumps, power meter modules, variable attenuators, telescopes, field lenses, beam homogenizers, turning mirror blocks, multi-position mask changers, imaging lenses, gas jet nozzles and more.

For more information, see the BDS components page.