Products

JPSA Beam Delivery Components

excimer and DPSS laser micromachining systems

Beam delivery component features include:

Interchangeable modules to control beam intensity and fluence
Modules also control beam shape and distribution
Metal parts in contact with optics are nickel-plated or machined of billet aluminum
Components are free of grease or lubricants
Seals and gaskets are shielded to prevent deterioration

For more information on JPSA's beam delivery components, contact JPSA.

JPSA offers the following BDS components:

Model BT Beam Enclosure Tube

Rugged 1/4-inch wall tube that completely encloses the beam and provides a sturdy support structure for other components. Can be assembled with other JPSA modules to create a leak-tight, nitrogen-purgeable optical system for VUV applications (193nm, 157nm). Standard and custom lengths available.
Model UM-SW Beam Switcher Module

A 45-degree kinematic mount that can be repositioned within its housing in 90-degree increments. Using the beam switcher, you can redirect the beam along (up to) four beam paths, which is ideal for multiple optical setups. The unit includes a precision optic retainer that is spring loaded to limit mechanical stress on the optic. It can be fitted with a 100% or partially-reflecting 2-inch diameter mirror, or a 1.5mm thick UV beam splitter. The mount's hollow design permits transmitted light to pass through the beam switcher for diagnostics, and so on.
Model GTM Gimball Turning Mirror

The turning mirror features a two-axis gimbal mechanism that provides precise X,Y pivot adjustment without crosstalk or walk-off. The unit accepts a 2-inch-diameter mirror and features quick access front surface mount to ensure that alignment is maintained after optics cleaning. Only non-ablating materials are in contact with the optics to ensure long optics cleaning intervals. A solid aluminum housing ensures excellent long term stability.
Select DUV Optics

JPSA's deep UV optics are made from select grade UV fused silica, calcium fluoride and magnesium fluoride substrates that we 100% inspect in our optical testing facility.
Model OXH Off Axis Beam Homogenizer

Available in a variety of focal lengths. Incorporates two pairs of off-axis cylinder lenses. These lenses cut the beam into nine beamlets and overlap them to produce extremely uniform illumination for excimer imaging applications. The position of each lens is micrometer-adjustable for precise sizing and overlay of each beamlet, ensuring maximum uniformity regardless of beam profile. The OXH produces a profile with less than 5% to 10% intensity variation, with optical transmission greater than 95%.
Model TH-CE Precision Beam Expander/Condenser

Expands or condenses laser beams. An internally mounted, micro-adjustable lens translator permits fine tuning of the output beam collimation without changing the length of the device. Cylindrical and spherical designs are available in a variety of expansion and compression ranges. Special dual anamorphic designs are available to change beam height and width independently using only three lenses.
Model RVA (Rectangular Variable Aperture)

Available as two-axis (auto-centering) unit or as computer-controlled servo-micrometer adjusting. Useful as an adjustable imaging mask or spatial filter, the RVA incorporates four precision-ground, stainless steel blades that are independently micrometer adjustable. You can adjust the aperture to squares, vertical or horizontal lines and rectangles ranging in size from a few microns to two centimeters. The RVA can absorb up to 100 watts of laser energy without supplemental cooling.
Model THF — Telescopic Lens Translation Head

A micro-adjustable translation device ideal for lens focus adjustment. Translation is performed by rotating the large knurled knob built into the housing. Two versions are available: the TH-F-HP1 features high-precision crossed-roller bearings and 1 inch of travel while the TH-F-S3, features 3 inches of travel and Teflon® bushings. Configured as a focus head, the TH-F includes the LC-XY adjustable lens mount with a 1.5-inch-diameter lens. The TH-F mates to other JPSA beam delivery modules and is purgeable for VUV (193nm, 157nm) applications.
Model UM-VA Variable Beam Attenuator

Available in standard or zero walk-off versions, manual or motorized. Permits precise adjusment of laser energy on-target without adjusting the laser. A specially-coated optic is mounted on a rotary axis within the device. The transmission of the laser beam through this optic is changed by adjusting the angle of the optic relative to the beam. Laser beam intensity on-target can be adjusted between 1% and 94% or to 100% by rotating the optic out of the beam path.
Model TH-V Variable Field Lens

Provides continuously variable focal lengths from 500mm to infinity. An internally mounted, micro-adjustable lens translator allows you to fine-tune the focal length without changing the deivce length. This unit is especially useful in compensating for beam divergence or for precisely matching the beam to the back numerical aperture of an imaging lens.
Model LC-XY (X,Y Adjustable) Lens Cell

Single axis version available. A precision, open frame X,Y translator that attaches to the TH-F translation head. Lenses and apertures can be positioned with micron resolution for precise centering or beam steering. Bidirectional adjustment over +/- 1mm. Locking screws provide long term stability. The unit features an industry standard 2.25-20 internal thread which accepts a range of screw-in optic mounts. A standard 1.5-inch-diameter optic cell is included.