JPSA Industrial Excimer and DPSS Laser Micromachining Systems
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PV-5000 Thin Film Photovoltaics Laser Scribing System JPSA’s high throughput production system for scribing P1, P2, P3 and P4-border deletion. A wide range of lasers available to match the TAKT time required for production. A flexible system which can scribe film side or glass side with integrated debris management. The system incorporates multiple beamlets for fast processing with auto-focus to handle non-flat glass. |
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IX-3000 Micromachining System
JPSA’s high-throughput IX-3000 is an Excimer-based laser step and scan ablation system for micro-machining, drilling, and laser processing of a wide range of materials. Flexible, powerful, industrial-grade and designed for high-volume throughput, the IX-3000 is a high-accuracy mask imaging system for large field of view (LFOV) processing applications. |
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IX-6000 Series
A high-accuracy, ultra stable, excimer or DPSS laser workstation. The new IX-6000 series provides robotic wafer handling for up to 300mm diameter wafers. The new IX-6100 ChromaDice™ solid state laser machining system delivers highspeed wafer singulation integrated with a state of the art wafer loading system. Featuring dual SMIF or FOUP load ports, the IX-6100 is ready for the most demanding wafer die singulation production task. Whether micromachining features to 2um or configured for large area exposure of up to 5mm x 5mm, the IX-6600 is ready for any production challenge. Featuring dual cassette load ports, production grade robotics, wafer pre-aligners and vision, the IX-6600 is a versatile production tool in an easy to use Class I laser system. The part handling system and laser beam delivery optics are mounted to a granite support structure that is triple vibration isolated. |
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IX-200 Series
The 'Swiss Army Knife' of laser machining systems. Can be configured with either an excimer (IX-260) or DPSS (IX-200) laser for large area or direct write applications. |
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IX-70 Short Deletion Tool
Table top or gantry mounted DPSS laser system for on-target inspection and short deletion. Developed for the repair of flat panel displays, micro circuits and wafers, the IX-70 can be applied in a variety of micromachining applications. |
News and Events
JPSA Laser provides excimer and Diode Pumped Solid State (DPSS) laser micromachining solutions for:
- Thin film PV patterning
- Laser scribing
- LED Lift-Off (LLO)
- Laser dicing
- Silicon edge isolation
- Ink-jet nozzles
- Microfluidic devices
- Micro vias
- Annealing and doping
- Parylene ablation
- Concentrator photovoltaics
See JPSA at:
Photonics West
Booth 5124
Moscone Center
San Francisco, CA
Jan 26-28
PHOTON‘s Photovoltaic Technology Show
Booth I-11
Moscone Center-West Hall
San Francisco, CA
February 2 - 4, 2010
