JPSA UV Excimer Laser Refurbishment, Upgrades and Repair
The most expensive component in an excimer laser workstation is the laser itself. It is also the component that most frequently requires repair or refurbishment. JPSA offers comprehensive repair and refurbishment services to ensure that our customers' systems continue to function well for years after installation.
JPSA's service engineers and repair technicians have over 25 years of combined experience refurbishing excimer lasers to original factory specifications. Our facility includes a full laser repair and refurbishment laboratory as well as a large inventory of spare parts. JPSA also offers laser tube refurbishment services using parts supplied by the customer.
JPSA currently offers the laser refurbishment services for all models of Lambda Physik® excimer UV lasers including NovaTube® lasers.
Laser Refurbishment
Normal laser reconditioning includes:
- Disassembling and cleaning the laser enclosure and electrical components
- Refurbishing the valve manifold and gas plumbing (see below)
- Refurbishing laser vessel, including:
- Cleaning and inspecting the fan assembly, replacing the bearings if necessary
- Cleaning and inspecting the electrodes, replacing or re-profiling as required
- Cleaning and inspecting the pre-ionization assembly, gapping the pre-ionization pins (spark pre-ionized lasers) and replacing burnt pins as required
- Cleaning and inspecting the high voltage insulating materials for tracking evidence
- Cleaning, inspecting and repairing (if necessary) the resonator optic mounts
- Installing new resonator optics
- Reassembling the laser head, performing vacuum and pressure leak tests
- Test running the laser head at JPSA to ensure that output meets or exceeds factory specs
- Inspecting the pulse forming network including: thyratron, capacitors, magnetics, oil cooling system, and high voltage supply, repairing or replacing components as required
- Changing the vacuum pump oil, replacing the halogen filter and service pump, if required
- Cleaning and inspecting the energy detector and replacing the beam splitting optics
- Recalibrating the energy detector, pressure sensor and HV power supply
- Reassembling and testing the laser at JPSA to ensure that the laser meets or exceeds factory specs
- Leak-checking the laser for 24 hours and burning it in for 24 to 48 hours, over the course of a week in final test, including documenting a laser final test report and verifying the gas lifetime, power, energy and beam quality
Note: Parts required for refurbishment are additional.
Valve Manifold Reconditioning
It is highly recommended that the valve manifold be reconditioned with any laser tube only refurbishment. The cost for this service is US$1,000.00, including normal parts. A spare replacement unit can be purchased from the laser manufacturer to allow exchange during the valve manifold refurbishment. In addition, the stainless steel tubing should be cleaned when a laser tube is installed into a laser after refurbishment.
Laser Refurbishment Warranty
Workmanship is warranted for 90 days from the date of shipment to the customer. All parts carry the OEM warranty. Any warranty claims or returned parts are sent freight prepaid to JPSA for repair. Delivery is four weeks from receipt of the tube at JPSA, but is subject to availability and delivery of original laser manufacturer parts.
For more information, contact JPSA.
News and Events
JPSA Laser provides excimer and Diode Pumped Solid State (DPSS) laser micromachining solutions for:
- Thin film PV patterning
- Laser scribing
- LED Lift-Off (LLO)
- Laser dicing
- Silicon edge isolation
- Ink-jet nozzles
- Microfluidic devices
- Micro vias
- Annealing and doping
- Parylene ablation
- Concentrator photovoltaics
See JPSA at:
Photonics West
Booth 5124
Moscone Center
San Francisco, CA
Jan 26-28
PHOTON‘s Photovoltaic Technology Show
Booth I-11
Moscone Center-West Hall
San Francisco, CA
February 2 - 4, 2010