Micromachining with Excimer Lasers

• Typical Laser Materials Processing Applications
• Typical Industrial Laser Machining System Components
• Comparing Laser Types

Excimer Laser Overview

• UV Excimer Laser Configurations
• UV Excimer Laser Gases
• Excimer Gas Transition
• UV Excimer Laser Discharge
• A Discharge Process Example
• Laser Gas Reservoir
• UV Excimer Laser Advantages
• UV Excimer Lasers Disadvantages
• UV Excimer Laser Capital and Operational Costs
• UV Excimer Laser Gas Mixtures and Wavelengths
• Halogen Depletion Effect
• Energy Stabilization
• Gas Mixture Adjustments
• Commercial Excimer Laser Configuration
• Excimer Laser Control Schemes
• Extending Gas Life
• Gas Processing
• Laser Beam Profile
• Gas Mixtures and Beam Shape
• Changes in Beam Profile as a Function of Laser Life
• Beam Profilometry
• Beam Profile Viewing
• Controlling Beam Power
• Power Density Stabilization

Principles of Excimer Materials Processing

• Excimer Light and Material Interaction
• Photo ablation
• Beam Compression and Power Density
• Near-Field Imaging
• Beam Utilization Factor (BUF)
• Optics Losses

Beam Delivery Techniques

• Contact Mask Processing
• Masks
• Imaging Systems
• Long Working Distance Optical Systems
• Microscope Imaging Systems
• Refractive Objectives
• Reflective Objectives
• Beam Conditioning for Reflective Objective Systems
• Part Viewing in Microscope Systems
• Beam Homogenization
• Beam Shaping
• Geometrical Beam Division
• Motion-controlled Beam Delivery
• Scanning Illumination Schemes
• Coordinated Opposing Motion Imaging
• Direct Write Machining
• Optical System Design Issues

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