Typical UV excimer laser beams have distinct profiles, as shown here.
Typical UV excimer laser beam parameters are:
| Long Axis (L) | Short Axis (W) | |
|---|---|---|
| Size (mm) | 23 | 8 |
| Distribution | Flat-topped | Gaussian |
| Divergence (mr, FWHM) | 6 | 2 |
| Line width (nm, FWHM) | 0.5 | 0.5 |
| Stability (±%) | 5 | 5 |
| Beam type | High-order multi-mode Low spatial coherence |
High-order multi-mode Low spatial coherence |