UV excimer laser scanned image illumination is a powerful technique for homogenizing and increasing the effective beam area. The uniform coverage and large irradiated area permit greater flexibility in the size and shape of features that can be created. Using a properly designed lens system, 3µm feature resolutions at 20 J/cm2 fluence with a feature area of 2mm2 have been achieved. In order to achieve uniform exposure, laser pulses must be accurately interpolated with the scanning mirror feed rate. Using the motion control system to generate laser trigger pulses is one way to accomplish this goal.